DUV是深紫外线（Deep Ultraviolet Lithography），EUV是极深紫外线（Extreme Ultraviolet Lithography）。从制程范围来看，DUV基本上只能做到25nm，Intel凭借双工作台的模式做到了10nm，但是却无法达到10nm以下。只有EUV能满足10nm以下的晶圆制造，并且还可以向5nm、3nm继续延伸。
EUV的价格是1-3亿美金/台，DUV的价格为2000万-5000万美金/台不等。

affirm和allege的区别

affirm vt.断言,坚持声称；证实,确认
verb
(formal) to state firmly or publicly that sth is true or that you support sth strongly: [VN] Both sides affirmed their commitment to the ceasefire. ◆ The decision was affirmed by the Court of Appeal. ◆ [V that] I can affirm that no one will lose their job. [also V speech]
affirmation noun [U, C]: She nodded her head in affirmation.

allege vt.断言，宣称，硬说
verb
[often passive] (formal) to state sth as a fact but without giving proof: [V (that)] The prosecution alleges (that) she was driving carelessly. ◆ [VN that] It is alleged that he mistreated the prisoners. ◆ [VN to inf] He is alleged to have mistreated the prisoners.
Help Note: This pattern is only used in the passive. [VN] This procedure should be followed in cases where dishonesty has been alleged. [also V speech]
alleged adjective [only before noun] (formal): the alleged attacker / victim / killer (= that sb says is one) ◆ the alleged attack / offence / incident (= that sb says has happened) ◆ The girl gave evidence in court against her alleged attacker.
allegedly adverb: crimes allegedly committed during the war